The FEI Verios 460L field-emission scanning electron microscope (FESEM) is an ultra-high resolution Schottkey emitter SEM. The Verios 460L is an unconventional SEM. Through clever design, the Verios 460L allows for ultra-high resolution imaging at low energy on insulating samples with no conductive coating. The Verios 460L is equipped with a wide array of low and high energy electron detectors including a transmission detector and an energy dispersive X-ray spectrometer.

Equipment Specifications

Detectors
  • Everhart-Thornley low energy electron detector (EDT)
  • Through-the-lens low energy electron detector (TLD)
  • Mirror (in lens) high energyelectron detector (MD)
  • In-column high energy electron detectro (ICD)
  • Concentric (insertable) higher energy electron detector (CBS)
  • Transmission high energy electron detector (STEM)
  • Oxford energy dispersive X-ray spectometer (EDS)
  • On board current meter
Electron Landing Energy
  • 20eV – 30 keV
Magnification
  • 40X – 2MX
Resolution (SE)
  • 0.6 nm from 2 kV to 30 kV
  • 0.7 nm @ 1kV
  • 1 nm @ 500 V
Working Distance
  • 0.5-20 mm focusable (<2mm not recommended)
Specimen Stage
  • Eucentric tilt -10° to +60º
  • Rotate 360º
  • x = -50 to +80 mm
  • y = -50 to +50 mm
  • z = 20 mm maz

Documentation

FEI Verios 460L

Checklist for Verios Operation

Instrument Photograph and Examples

Verios_460L_NCSU_2

FEI Verios 460L Instrument

Latex spheres with DNA-tethererd Au nanorods

Latex spheres with DNA-tethererd Au nanorods

 

BaTiO3 on sapphire

BaTiO3 on sapphire

 

Fracture surface of mixed ferrite spinel

Fracture surface of mixed ferrite spinel

 

MgO thin film on Sapphire

MgO thin film on Sapphire

 

Polyactic acid fibers with ALD ZnO coating

Polyactic acid fibers with ALD ZnO coating

 

Polyactic acid fibers with Au nanoparticles

Polyactic acid fibers with Au nanoparticles

 

Screw dislocation in homoepitaxial GaN

Screw dislocation in homoepitaxial GaN