X-Ray Photoelectron Spectroscopy (XPS) is a surface analysis technique that can provide elemental and chemical bonding information from the very top surface of a specimen. The specimen is bombarded with X-Rays and emitted electrons are energy analyzed. Most of the signal arises from the first few monolayers. Elemental characterization of the surface can be achieved with about 0.1% detection limit and chemical bonding information can be obtained from differences in binding energy. The cleanliness of the sample and the storage container is very important.


SPECS XPS Sample Stage
Instrument-032613-468x288 Sample stage 032613

Equipment Specifications


  • Al/Mg dual anode
  • Al/Ag dual anode monochromator
  • UV (helium)


  • Ar ion gun for sputter cleaning of surface (up to 5kV)
  • Six channeltron array detector and spin detector
  • Specimen heating and cooling
  • Electron flood gun for charge neutralization (1μA emission at 2.5V)

X-Ray Energy

  • 10-14kV for Al/Mg and Al/Ag sources


  • PHOIBOS 150, <1eV resolution

Data Output

  • CasaXPS or Excel

Specimen Requirements

  • Ultra high vacuum compatible
  • Store in Fluroware, glass, or Al foil
  • Specimen size 1cm x 1cm
  • Powders can be analyzed