The TM4000 Series provides a solution for SEM users to easily obtain high- quality data and quickly generates reports enabling a very efficient workflow. It accommodates sample sizes of up to 80 mm in diameter and 50 mm in thickness.
Questions? Contact Phillip Strader at pmstrade@ncsu.edu.
Location: MRC room 324a
Equipment Specifications
Magnification |
- ×10~×100,000 (Photographic magnification)
- ×25~×250,000 (Monitor display magnification)
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Accelerating voltage |
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Image signal
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- Backscattered electrons (BSE)
- Secondary electrons (SE)
- Mix (Backscattered electrons + Secondary electrons)
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Vacuum mode
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- BSE: Conductor/Standard/Charge-up reduction
- SE: Standard/Charge-up reduction
- Mix: Standard/Charge-up reduction
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Image mode(BSE) |
- COMPO/Shadow 1/Shadow 2/TOPO
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Sample stage traverse |
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Maximum sample size |
- 80 mm (in diameter) , 50 mm (in thickness)
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Electron gun |
- Pre-centered cartridge tungsten filament
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Signal detection system |
- BSE: High-Sensitivity 4-segment BSE detector
- SE: High-Sensitivity Low-Vacuum SE detector
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Auto image adjustment function |
- Auto start, Auto focus, Auto brightness/contrast
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Save image size |
- 2,560 × 1,920 pixels, 1,280 × 960 pixels, 640 × 480 pixels
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Image format |
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Data display |
- Micron marker, micron value, magnification, date and time, image number and comments, WD (Working Distance), accelerating voltage, observation conditions, observation mode, image mode, detection signals
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Evacuation system (vacuum pump)
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- Turbo molecular pump: 67 L/s x 1 unit
- Diaphragm pump: 20 L/min
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Operation help functions |
- Raster rotation, Magnification presets (3 steps), Image shift (±50 µm @WD 6.0 mm)
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Safety functions |
- Over-current protection function, built-in ELCB
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Size / weight
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- 330 (width) × 614 (depth) × 547 (height) mm, 52 kg (motorized stage)
- 330 (width) × 617 (depth) × 547 (height) mm, 52 kg (manual stage)
- Diaphragm pump : 144(width) × 270 (depth) × 216 (height) mm
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Images