Hitachi TM4000 Tabletop SEM

The TM4000 Series provides a solution for SEM users to easily obtain high- quality data and quickly generates reports enabling a very efficient workflow. It accommodates sample sizes of up to 80 mm in diameter and 50 mm in thickness.

Questions? Contact Phillip Strader at pmstrade@ncsu.edu
Location: MRC room 324a

Equipment Specifications

Magnification
  • ×10~×100,000 (Photographic magnification)
  • ×25~×250,000 (Monitor display magnification)
Accelerating voltage
  • 5 kV, 10 kV, 15 kV

Image signal

  • Backscattered electrons (BSE)
  • Secondary electrons (SE)
  • Mix (Backscattered electrons + Secondary electrons)

Vacuum mode

  • BSE: Conductor/Standard/Charge-up reduction
  • SE: Standard/Charge-up reduction
  • Mix: Standard/Charge-up reduction
Image mode(BSE)
  • COMPO/Shadow 1/Shadow 2/TOPO
Sample stage traverse
  • X: 40 mm Y: 35 mm
Maximum sample size
  • 80 mm (in diameter) , 50 mm (in thickness)
Electron gun
  • Pre-centered cartridge tungsten filament
Signal detection system
  • BSE: High-Sensitivity 4-segment BSE detector
  • SE: High-Sensitivity Low-Vacuum SE detector
Auto image adjustment function
  • Auto start, Auto focus, Auto brightness/contrast
Save image size
  • 2,560 × 1,920 pixels, 1,280 × 960 pixels, 640 × 480 pixels
Image format
  • BMP, TIFF, JPEG
Data display
  • Micron marker, micron value, magnification, date and time, image number and comments, WD (Working Distance), accelerating voltage, observation conditions, observation mode, image mode, detection signals
Evacuation system
(vacuum pump)

  • Turbo molecular pump: 67 L/s x 1 unit
  • Diaphragm pump: 20 L/min
Operation help functions
  • Raster rotation, Magnification presets (3 steps), Image shift (±50 µm @WD 6.0 mm)
Safety functions
  • Over-current protection function, built-in ELCB
Size / weight
  • 330 (width) × 614 (depth) × 547 (height) mm, 52 kg (motorized stage)
  • 330 (width) × 617 (depth) × 547 (height) mm, 52 kg (manual stage)
  • Diaphragm pump : 144(width) × 270 (depth) × 216 (height) mm

Images