Field Emission Scanning Electron Microscope – Hitachi SU8700

The Hitachi SU8700 field-emission scanning electron microscope (FESEM) is an ultra-high resolution Schottkey emitter SEM.  Through clever lens design, the SU8700 allows for ultra-high resolution imaging at low energy on insulating samples with no conductive coating. The SU8700 is equipped with a wide array of low and high energy electron detectors including an energy dispersive X-ray spectrometer.

 

Questions? Contact Chuck Mooney at cbmooney@ncsu.edu. 
Location: MRC room 118

Equipment Specifications

Detectors– Everhart-Thornley secondary electron detector (UD)
– Upper secondary electron detector (UD)
– In lens backscattered electron detector (MD)
– Insertable backscattered electron detector (CBS)
– Oxford energy dispersive X-ray spectometer (EDS)
– Oxford Symmetry EBSD detector
Electron Landing Energy10eV – 30 keV
Magnification10X – 2MX
Resolution (SE)0.8 nm @ 15 kV
Working Distance1.5-45 mm focusable, beam energy dependent
Specimen Stage– Eucentric tilt -5° to +65º
– Rotate 360º
– x = -25 to +25 mm
– y = -25 to +25 mm
– z = 1.5 – 40 mm

Documentation