Field Emission Scanning Electron Microscope – FEI Verios 460L

Verios_460L_NCSU_2 The FEI Verios 460L field-emission scanning electron microscope (FESEM) is an ultra-high resolution Schottkey emitter SEM. The Verios 460L is an unconventional SEM. Through clever design, the Verios 460L allows for ultra-high resolution imaging at low energy on insulating samples with no conductive coating. The Verios 460L is equipped with a wide array of low and high energy electron detectors including a transmission detector and an energy dispersive X-ray spectrometer.

Questions? Contact Chuck Mooney at cbmooney@ncsu.edu.
Location: MRC room 118

Equipment Specifications

Detectors	Everhart-Thornley low energy electron detector (EDT) Through-the-lens low energy electron detector (TLD) Mirror (in lens) high energy electron detector (MD) In-column high energy electron detector (ICD) Concentric (insertable) higher energy electron detector (CBS) Transmission high energy electron detector (STEM) Oxford energy dispersive X-ray spectometer (EDS) On board current meter
Electron Landing Energy	20eV – 30 keV
Magnification	40X – 2MX
Resolution (SE)	0.6 nm from 2 kV to 30 kV 0.7 nm @ 1kV 1 nm @ 500 V
Working Distance	0.5-20 mm focusable (<2mm not recommended)
Specimen Stage	Eucentric tilt -10° to +60º Rotate 360º x = -50 to +80 mm y = -50 to +50 mm z = 20 mm maz